摘要
本文概述了低温微电子学的研究与发展状况.低温将为微电子器件、电路和系统提供优化的工作环境,并极大地提高了器件、电路和系统的性能.高温超导薄膜技术的进展导致了超导/半导兼容电子学的勃起.可以相信,低温微电子器件、电路和系统以其具有的高速低功耗高可靠的特性,为GSIIC、超级计算机、空间和天文电子学、红外探测器等的发展所必需.
Hopefully this article has provided a glimpse of the status, potential and tradeoff of low temperature microelectronics. Low temperatures provide an optimum operating environment for microelectronic devices, circuits and systems, and significantly improve their performance. The recent discovery of the films of high-Tc superconducting materials leads the combinations of superconductors and semiconductors, and the establishment of hybrid low temperature electronics. Increased speed, lower power consumption and higher reliability of low temperature microelectronic devices, circuits and systems will meet thd needs of GSIIC. supercomputer, astronomy and space electronics, and infrayed detectors.
出处
《电子器件》
CAS
1991年第4期18-28,共11页
Chinese Journal of Electron Devices
基金
国家自然科学基金资助项目
关键词
低温
微电子学
电路
微电子器件
low temperatrue, microelectronics, superconductor.