摘要
本文介绍利用一种白光光谱仪测量绝对距离和位移的方法。利用迈克耳逊干涉结构,使用光谱仪S2000,进行光谱分析,在知道光学元件的群折射率和厚度的情况下,利用均衡波长的概念就可以得出绝对距离。该方法不需要应用相位重现程序,其测量范围大大超过传统白光干涉技术的测量范围,为绝对距离的测量提供一些详尽的参考。
This article introduces a measurement of absolute distances and displacements by an interferometric technique using a white-light fiber optic spectrometer. Employing a dispersive Michelson interferometer and a low-resolution spectrometer and with different amounts of dispersion in the interferometer, and knowing dispersion in the interferometer and the bandpass of the spectrometer, the absolute distance can be measured. The new technique extends the use of white-light spectral interferometer for distance and displacement measurement with high resolution, and at the same time it do not need the phaserecurring technique. It offers some reference for the measurement of absolute distance.
出处
《仪器仪表用户》
2009年第4期6-7,共2页
Instrumentation
关键词
绝对距离测量
均衡波长
白光
光谱仪
absolute distance measurement
equalization wavelength
white-light
spectrometer
