摘要
研制了用于纳米计量的双元扫描隧道显微镜 ,介绍了双元扫描隧道显微镜的原理和仪器系统 ,利用该系统对原子晶格图象进行扫描 ,验证了纳米计量的可行性 。
A dual tunneling unit scanning tunneling microscopc(DTU-STM) is developed for nano-metrology.This article describes the measurement concept and the instrument of the DTU-STM.The crystalline lattice images were scanned by the DTU-STM to check the feasibility of nano-metrology.One metrological result of test sample image was provided.
出处
《光学仪器》
2000年第5期31-34,共4页
Optical Instruments
