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基于双ZnO薄膜单元并联结构的微型压电振动能量采集器(英文)

A ZnO Thin Film Based Piezoelectric Vibration Energy Harvester with Two Sensing Elements in Parallel Connection
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摘要 报道了一种基于ZnO压电薄膜双单元结构的压电式微型振动能量采集器,其中的双压电元件是并联结构.采用射频磁控溅射技术制备ZnO压电薄膜,同时,该压电式振动能量采集器采用微加工技术制作.测试表明该器件的共振频率为1 300 Hz,基于ZnO薄膜双单元并联结构的压电式振动能量采集器比起具有同样尺寸的传统型压电振动能量采集器有更高的输出性能.在频率为1 300 Hz,加速度为10 m/s2的外界振动激励下,该压电式振动能量采集器在1 MΩ负载电阻上产生的电压为2.06 V;当负载电阻为0.6 MΩ时,输出功率最大为1.25μW. A zinc oxide （ZnO） piezoelectric vibration energy harvester with two ZnO sensing elements in parallel connection is presented. The ZnO thin film was deposited by using radio-frequency （RF） magne- tron sputtering method and the energy harvester was fabricated by using micro electro mechanical systems （MEMS） mieromachining technique. The resonant frequency of the fabricated ZnO energy harvester is 1 300 Hz. The tested results show that this energy harvester has better output performance than that of the energy harvester with traditional design. The load voltage is 2.06 V under the load resistance of 1 MΩ and the maximal output power is 1.25μW under the load resistance of 0. 6 MΩ, when the prototype is excited by an external vibration with the frequency of 1 300 Hz and the acceleration of 10 m/s2.
作者 王佩红 杜和军
机构地区 安徽大学物理与材料科学学院 新加坡南洋理工大学机械与航天工程学院
出处 《纳米技术与精密工程》 CAS CSCD 2013年第4期309-313,共5页 Nanotechnology and Precision Engineering
基金 supported by the National Natural Sci-ence Foundation of China(No.51007001) the 211 Project of Anhui University and Start-up Grant for Doctor's Research of Anhui University~~
关键词 ZNO薄膜 压电效应 MEMS 压电振动能量采集器 ZnO thin film piezoelectric effect MEMS piezoelectric vibration energy harvester
分类号 TM91 [电气工程—电力电子与电力传动]
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参考文献15

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二级参考文献13

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纳米技术与精密工程
2013年 第4期

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