摘要
本文中设计了一种结构新颖的三明治型电磁式微振动能量采集器,主要包括上线圈、下线圈和由永磁体与硅基平面镍弹簧构成的拾振系统.上、下线圈的对称性分布有利于充分利用永磁体周围的磁场从而提高整个器件的机械能-电能转换效率.实验样机主要采用MEMS微加工技术制作,其中的硅基平面镍弹簧采用体硅微加工和微电镀技术制作,双层铜线圈采用微电镀和聚酰亚胺绝缘层技术制作.实验样机的体积约为0.32 cm3.振动特性测试表明,在外界加速度小于8 m/s2时,永磁体振幅随着加速度的增加而增加,在加速度大于8 m/s2以后,振幅几乎不再增加,出现饱和现象.电学特性测试表明,在8 m/s2加速度作用下,单线圈和串联线圈产生的感应电压峰峰值分别为82.5 mV和125 mV,因此,三明治结构的新型设计使得输出电压增加了51.5%.另外,在加速度为8 m/s2、频率为280.9 Hz的外界振动激励下,实验样机产生的最大负载电压和最大负载功率分别为125 mV和13.2μW.
This paper presented the design,fabrication and performance of a sandwiched vibration based electromagnetic energy harvester,which mainly consists of a top coil,a bottom coil,a NdFeB permanent magnet and a nickel planar spring integrated with silicon frame.The symmetrical arrangement of two coils helps to make full use of the magnetic field around the permanent magnet so as to increase the efficiency of transition from mechanical energy to power energy.The prototype was fabricated mainly with MEMS technology,in which the nickel planar spring with silicon frame was made with silicon micromachining and microelectroplating techniques and the two-layer copper coil was fabricated using microelectroplating and polyimide as insulation layer.The assembled device was about 0.32 cm3 in size.Results of tests for vibration characteristics show that the vibration amplitude of the permanent magnet increased with the increase of the input vibration acceleration till 8 m/s2 and then hardly increased for saturation.Results of tests for electrical characteristics indicate that the load voltages generated by the single coil and series coil under acceleration of 8 m/s2 were 82.5 mV and 125 mV,respectively.Therefore,the novel design of sandwiched structure raised the induced voltage by 51.5%.In addition,the maximum load voltage and the maximum load power generated by the sandwiched prototype were 125 mV and 13.2 μW,respectively,under the acceleration of 8 m/s2 and vibration excitation with resonant frequency of 280.9 Hz.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2010年第6期510-515,共6页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(50977056
51007001)
安徽大学青年科学研究基金资助项目(2009QN005A)
关键词
微机电系统
振动能量采集
电磁式
三明治结构
micro electro mechanical system
vibration energy harvesting
electromagnetic
sandwiched structure
