摘要
制备一种纳米氧化硅抛光液,采用扫描电子显微镜、激光粒度仪、颗粒计数仪等对其物性参数进行表征;使用该抛光液对LED蓝宝石衬底进行机械化学抛光,采用轮廓仪、表面缺陷检测设备、原子力显微镜等对抛光后的蓝宝石衬底表面进行表征。结果表明,制备的纳米氧化硅抛光液对LED蓝宝石衬底具有优异的抛光性能,抛光后的表面无划伤、无腐蚀坑,且粗糙度小于0.2 nm。
To meet the ultra-precision machining requirement of single-crystal sapphire substrate for advanced electronic products, such as LED, one kind of silica-based slurries was prepared and its properties were investigated by scanning electronic microscope （ SEM ）, Laser particle size analyzer and particle counting instrument. The polishing performance of as-prepared slurry on LED sapphire substrate was studied, and the polished sapphire surface was inspected by FRT profilometer, Candela optical surface analyzer （ OSA）, and atomic force microscope （ AFM ）. The results indicate that as-prepared slurry exhibits excellent polishing performance and the average roughness of obtained sapphire surface without scratch and pit is below 0. 2 nm.
出处
《润滑与密封》
CAS
CSCD
北大核心
2013年第7期88-91,共4页
Lubrication Engineering
