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High precision mode of subaperture stitching for optical surfaces measurement 被引量:1

High precision mode of subaperture stitching for optical surfaces measurement
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摘要 Subaperture stitching (SAS) provides us with an attractive way of extending the effective aperture and dynamic range of phase measuring interferometers. Accuracy of stitching algorithm becomes the key factor in the SAS technology. In this paper, the basic principle of SAS was introduced and four modes of SAS were discussed. The stitching experiments were done through the SSI-300 workstation designed and developed indepen- dently. There were several comparisons between the four different stitching methods and the measurement of full aperture. The results suggest that the global error averaging mode with reference of subaperture near optic axis is of high precision. Subaperture stitching (SAS) provides us with an attractive way of extending the effective aperture and dynamic range of phase measuring interferometers. Accuracy of stitching algorithm becomes the key factor in the SAS technology. In this paper, the basic principle of SAS was introduced and four modes of SAS were discussed. The stitching experiments were done through the SSI-300 workstation designed and developed indepen- dently. There were several comparisons between the four different stitching methods and the measurement of full aperture. The results suggest that the global error averaging mode with reference of subaperture near optic axis is of high precision.
出处 《Frontiers of Optoelectronics》 EI CSCD 2013年第2期167-174,共8页 光电子前沿(英文版)
基金 This work was supported by the National Natural Science Foundation of China (Grant Nos. 60978043, 61128012, 610611 60503, and 61222506).
关键词 optical testing subaperture stitching (SAS) algorithm stitching mode optical testing, subaperture stitching (SAS), algorithm, stitching mode
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