摘要
用脉冲偏压电弧离子镀技术在高速钢(HSS)基体上制备了一系列不同Cu含量的TiN-Cu纳米复合薄膜,用EPMA、SEM、GIXRD和纳米压痕等方法分别测试了薄膜的成分、形貌、相组成、硬度和弹性模量,重点考察薄膜成分对其硬度和弹性模量的影响。结果表明,Cu含量对薄膜的硬度和弹性模量影响显著,随着Cu含量的增加,薄膜硬度和弹性模量先增大后减小,在Cu含量为1.28 at%时,硬度和弹性模量达到最大值,分别为45.0 GPa和562.0 GPa。最后对TiN-Cu纳米复合薄膜的非晶-纳米晶强化机制进行了讨论。
TiN-Cu nanocomposite films with different copper contents were deposited by pulsed bias arc ion plating （AIP） on HSS substrates. The composition, morphology, phase composition, hardness and elastic modulus of the films were respectively investigated by electron probe microanalysis （EPMA）, scanning electron microscope （SEM）, grazing incidence X-ray diffraction analysis （GIXRD） and nano indenter. The influence of composition on the hardness and elastic modulus of the films was specially studied. The results show that the Cu content has a significant impact on the hardness and elastic modulus of the films. With the increase of the Cu content, the hardness and elastic modulus of the films increase first and then decrease. When the Cu content is 1.28at%, the hardness and elastic modulus reach their maximum, respectively 45.0GPa and 562.0GPa. Finally, the amorphous- nanocrystalline strengthening mechanism of TiN-Cu nanocomposite film was highly discussed.
出处
《真空》
CAS
2013年第3期52-56,共5页
Vacuum
