摘要
按照透射电镜对真空系统的控制要求与真空系统的构成,采用集散控制的思想,建立了以PLC为底层核心控制器,组态王作为集中管理软件的控制系统。上位机组态软件通过以太网与下位PLC进行通讯与数据交换,实现了较为完备的透射电镜真空系统的控制,该系统已投入使用,真空度符合要求,运行效果良好。
According to the demand and structure of transmission electron ＇microscope （TEM） vacuum system, a distributed control system was built by using PLC as field controller and Kingview as centralized control software. The communication between configuration software and PLC was implemented by Etheruet and the relatively complete TEM vacuum control system was achieved. The system has been put into use, meeting the requirements of vacuum degree and running well.
出处
《真空》
CAS
2013年第3期10-13,共4页
Vacuum
基金
国家科技支撑计划课题(2006BAK03A24)
关键词
透射电子显微镜
真空系统
PLC
组态软件
transmission electron microscope
yacuum system
PLC
configuration software
