摘要
由数值求解均匀的波尔兹曼方程，计算出在高频均匀的电场下氩放电中电子的能 量分布。计算适合于从低电子密度到足够高电子密度的广大区域。电场与气体密度的 比值在范围 １０^(－１６)Ｖcm＜Ｅ／Ｎ＜１０^(－１５)Ｖcm2．研究了在不同频率的高频电场下,电 子－电子碰撞对电子能量分布的影响。
The e1ectron energy distribution functions in argon under the action of an uniform high-frequency electric field are calculated by numerically solving the homogeneous Boltzmann equation. The calcu1ations cover the whole range of 1ow electron densities to sufficiently, high electron densities. Typical values of the ratios of the electric field to the gas density in this work are in the range of 10^(-16)Vcm2<E/N<10^(-15)Vcm2.The influence of electron-electron co1lisions on the electron energy distribution function under the action of different high- frequency electric field is investigated.
出处
《大连理工大学学报》
EI
CAS
CSCD
北大核心
1991年第4期389-392,共4页
Journal of Dalian University of Technology
基金
辽宁省科委资助课题
关键词
高频放电
气体放电
能量分布
氩
high frequency discharge
energy distribution
Boltzmann equation
Maxwell-BoltZmann distribution law
