摘要
由数值求解均匀的玻尔兹曼方程,计算出低压直流氩放电中电子的能量分布。计算适合于从低电子密度到高电子密度的广大区域,电场强度与气体密度比值在范围10^(-16)<E/N<10^(-15)。研究了各种电离度下电子的能量分布及电场对能量分布的影响。
Electron energy distributions of direct-curent argon discharges at low pressures were calculated by numerically solving the homogeneous Baltzmann equation. The calculations cover the whole range of low electron densities to sufficiently high electron densities. Typical values of the ratios of the electric field to the gas density in this work are in the renges of 10-16< E/N< 10-15 Vcm2. The influence of electron -electron collisions and the electric field on the electron energy distribution function was studied.
出处
《计算物理》
CSCD
北大核心
1990年第4期448-453,共6页
Chinese Journal of Computational Physics
关键词
氩
放电
电子
能量
低压
直流
direct-current argon discharge, electron energy distribution, baltzmann equation.
