摘要
This paper presents the design,fabrication,and characterization of a quartz tuning fork temperature sensor based on a new ZY-cut quartz crystal bulk acoustic wave resonator vibrating in a flexural mode.Design and performance analysis of the quartz tuning fork temperature sensor were conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor caused by an external temperature.Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor.The sensor prototype was successfully fabricated and calibrated in operation from 0 to 100 ℃ with the thermo-sensitivity of 70×10-6/℃.Experimental results show that the sensor has high thermo-sensitivity,good stability,and good reproducibility.This work presents a high-precision low-power temperature sensor using the comprehensive thermal characterization of the ZY-cut quartz tuning fork resonator.
This paper presents the design, fabrication, and characterization of a quartz tuning fork temperature sensor based on a new ZY-cut quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor were conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor caused by an external temperature. Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor. The sensor prototype was successfully fabricated and calibrated in operation from 0 to 100℃ with the thermo-sensitivity of70×10^-6/℃. Experimental results show that the sensor has high thermo-sensitivity, good stability, and good reproducibility. This work presents a high-precision low-power temperature sensor using the comprehensive thermal characterization of the ZY-cut quartz tuning fork resonator.
基金
Project (No. 11551074) supported by the Science Research Fund of Heilongjiang Provincial Education Department,China
