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高速原子力显微术研究进展 被引量：3

Progress in high-speed atomic force microscopy
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摘要 自1986年发明原子力显微镜以来,它已成为材料、生物以及纳米科技等许多领域的重要工具。由于常规原子力显微镜成像速度缓慢,在动态过程观测、工业生产线原位测量以及高密度信息存储等领域的应用受到限制,因此发展高速原子力显微术近年来已引起国内外的高度关注。本文综述了高速原子力显微术关键技术(包括:微小探针、高速扫描器设计和控制方法)以及应用等方面的最近进展。 Atomic force microscope（AFM） has become an important tool in the fields of material,biology and nano-science since it was invented in 1986.AFM provides a three-dimensional surface profile of insulating objects with atomic spatial resolution in atmosphere,liquid as well as vacuum.However,AFM imaging is slow and thus limited to observe quasi-static process.Recently,high speed atomic force microscopy（HSAFM） has been paid considerable attention for its potential applications in the study of biological dynamic process,in-situ measurement in industrial product line and ultra-high density storage.Centering on it,some researchers have done a lot of work making significant development in key technologies for improving the imaging speed of AFM and applications exploration.The author’s laboratory has also worked on HSAFM and got initial achievement.In the paper,recent progresses in key techniques of HSAFM including small cantilever,high speed scanner and control methods are reviewed,and its applications are briefly described.
作者 赵剑勇 蔡微 商广义
机构地区 北京航空航天大学仪器科学与光电工程学院 北京航空航天大学微纳测控与低维物理教育部重点实验室(筹) 北京航空航天大学物理科学与核能工程学院
出处 《电子显微学报》 CAS CSCD 2013年第1期81-89,共9页 Journal of Chinese Electron Microscopy Society
基金 科技部973课题(No.2013CB934004) 国家自然科学基金科学仪器基础研究专项(No.10827403)
关键词 原子力显微镜 高速原子力显微成像 动态过程观测 atomic force microscope（AFM） high speed AFM imaging dynamic process observation
分类号 TH742 [机械工程—光学工程]
  • 相关文献

参考文献57

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共引文献6

同被引文献17

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引证文献3

二级引证文献11

电子显微学报
2013年 第1期

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