摘要
以一种应用于扫描电镜的4-HSPS/PRPUR并联宏/微驱动操作手为研究对象,对该并联机构的工作空间进行了分析。4-HSPS/PRPUR并联宏/微驱动操作手的动平台与基座之间通过4个HSPS分支和1个PRPUR分支相连,机构动平台具有3个方向的移动自由度和绕X轴和Y轴的2个转动自由度。该并联机构同时包含了宏动输入部分和微动输入部分,本文分别对该机构在宏动输入和微动输入下的定姿态工作空间和灵活姿态角工作空间进行了分析。分析表明该机构具有较大的运动能力,同时还发现中间分支的连杆尺寸对运动空间形状有较大影响。综合该机构的定姿态工作空间和灵活姿态角工作空间可知,该并联宏/微驱动机器人能够应用于平台安装空间较小,工作空间需要较大并且定位精度高的场合。得到的结果对4-HSPS/PRPUR机构的应用有重要的理论指导意义。
The workspace of the 4-HSPS/PRPUR macro/micro actuated parallel mechanism applied to a scanning electron microscope is analyzed. The 4-HSPS/PRPUR macro/micro actuated parallel mech- anism is composed of a base and a moving platform connected by four HSPS branches and a middle PRPUR branch. It has three translational degrees of freedom and two rotational degrees of freedom a- bout the X axis and Y axis. Because the macro actuation and micro actuation are integrated together in this mechanism, this paper analyzes the constant orientation workspaee and the dexterous workspace of this mechanism. The analysis shows that this mechanism can move flexibly in large workspace and the link length of the middle branch has considerable influence on the shapes of the workspaces. On the analysis of the constant orientation and dexterous workspaces of this mechanism, it demonstrates that the mechanism is suitable for the work condition of smaller platform mount space, large work- space and higher positioning accuracy. This study provides a theoretical basis for the application of the 4-HSPS/PRPUR parallel mechanism.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2013年第3期717-723,共7页
Optics and Precision Engineering
基金
国家自然科学基金青年基金资助项目(No.51105322)
教育部高等学校博士学科点专项科研基金资助项目(No.20101333120001)
秦皇岛科学技术研究与发展计划资助项目(No.201101A137)
关键词
宏
微驱动
并联机构
工作空间
扫描电子显微镜
macro/micro actuation
parallel mechanism
workspace
scanning electron microscope
