摘要
非旋转对称的光学曲面越来越多地应用到现代光学系统中,但对该类光学面形的检测还基本依靠坐标测量机和接触式轮廓仪.利用计算全息图(computer-generated holograms,CGH)可以生成任意想要的波前这一特点,提出了利用计算全息来检测非旋转对称的光学曲面的非接触式测量方法,并通过对一个三次方面进行面形检测,详细给出了从检测系统的理论设计、CGH的制作到面形检测整个过程.检测结果的面形偏差PV值为1.047λ(λ=0.632 8×10-3 mm,氦氖激光波长),均方根(RMS)值是0.094λ.该方法可以作为现行接触式测量方法的有效补充,并且具有良好的前景.
The unsymmetrical optical surfaces are on their way to becoming critical components of modern optical systems.But now for this kind of surfaces,the surface testing is mainly depending on the coordinate machine or the profiler.There are obvious shortcomings for these contact measurements.Computer-generated hologram （CGH） has been used for years in optical testing of aspheric surfaces,and it can produce an optical wavefront with any desired shape.So it is fascinating and will have good prospects to test unsymmetrical surfaces using CGH.And it is a non-contact testing method.Take a cubic surface for example,the testing system design,the fabracation of the CGH and the testing process of the suface are presented in this paper.The testing result of the surface deviation is 1047 λ-PV,and the RMS value is 0049 λ.This method can become the effectively complement of the contact testing method.
出处
《厦门大学学报（自然科学版）》
CAS
CSCD
北大核心
2013年第2期177-181,共5页
Journal of Xiamen University：Natural Science
基金
福建省高校杰出青年科研人才培育计划项目(JA11228)
福建省教育厅A类科技项目(JA12254
JA10248)
福建省自然科学基金青年创新项目(2010J05144)
关键词
测量
非旋转对称
三次方面
计算全息图
measurement
unsymmetrical
cubic surface
computer-generated hologram （CGH）
