摘要
介绍了利用LIGA技术中的同步辐射光刻、微电铸技术和微装配技术制作微流量计的研究 ,讨论了微流量计的结构和工作原理 ,设计和研制了一种微流量计。
The fabrication of micro flowmeter using LIGA process and assembly technique is reported. The structure and principle of micro flowmeter is investigated. A kind of micro flowmeter has been designed and developed. The result indicates that the fabrication of micro flowmeter using LIGA process is successful.
出处
《微细加工技术》
2000年第4期73-76,共4页
Microfabrication Technology
