摘要
本文研究射频磁控溅射镍钛形状记忆薄膜相交行为和性能。 在一定化学成分下，晶化退火温度对富钛薄膜的相变过程及相变温度有很大影响。富钛薄膜的相变温度一般较高，马氏体相变温度在室温之上。在富钛薄膜中有可能出现双马氏体峰。 富钛薄膜在循环或者时效时。相交特性和结构显示了良好的稳定性。 研究结果表明，富钛的镍钛薄膜适当控制成份和热处理条件可具有适当的相变温度和较小滞后并且具有良好的形状记忆效应；可以得到只发生Ｒ相变及道相变的富钛薄膜、其相变温度滞后只有２℃左右，很适合用来制作徽机械驱动器。
Shape memory NiTi films are prepared by RF magnetron sputtering. We have investigated the phase transformation to free standing films and the films adhered to the substrate through the measures such as DSC, electric resistivity and the X - ray diffraction.The annealing temperature hasgreat effects on the transformation behavior of the films in the certain composition.In general, the transformation temperature of Ti - rich NiTi films are rather high; especially the martensitic is above foe room temperature. Double - martensitic transformation peaks might appear in Ti - rich NiTi films. The Ti - rich films transformation characterizations and structures show good stability against cyclic deformation or aging. The research results show that Ti - rich NiTi films can acquire proper transformation temperature, small hysteresis and good shape memory effect in the case of controlling composition and heat treatment appropriately. The Ti - rich NiTi films in which only r phase transformation and its adverse transformation can occur may be obtained. Its t6mperature hysteresis is merely 2℃, it is a suitable microactuation material.
出处
《包钢科技》
2000年第1期62-65,共4页
Science & Technology of Baotou Steel
关键词
镍钛合金薄膜
形状记忆效应
晶化
马氏体相变
NiTi alloy
film
shape memory effect
crystallization
martensitic transformation
