摘要
采用磁控溅射法制备TiNi非晶薄膜。通过X射线衍射(XRD)、透射电子显微镜(TEM)等方法研究了TiNi合金薄膜的组织形貌、电子衍射花样,并对其相变过程进行了动态观察。结果表明:态薄膜为非晶态,对其在515℃进行1h的晶化处理后,薄膜中析出了TiNi3相;晶化处理后的TiNi合金薄膜加热到100℃时,薄膜中R相和马氏体相以切变方式完全转变为奥氏体;当冷却至室温时,是以R相、马氏体相以及少量的奥氏体相存在。其加热过程中的相变顺序为:马氏体相→R相→奥氏体相。冷却过程中的相变顺序为:奥氏体相→R相→马氏体相。
The deposition of TiNi amorphous film by magnetron sputtering is presented in this paper. The morphology, diffraction pattern and the process of transformation can be investigated dynamically by differential scanning calorimetry （DSC）, X-ray diffraction （XRD） and transmission electron microscopy （TEM）. The result shows that the sputter-deposited film is amorphous and can be indicated the existence of TiNi2 after crystallization at 515℃. The order of transformation in the heating course is from martensitic phase to R-phase to austenitic phase. And the order of the cooling course is from austenitic phase to R-phase to martensitic phase.
出处
《稀有金属快报》
CSCD
2006年第7期18-21,共4页
Rare Metals Letters
基金
西安理工大学创新基金资助(101-210302)
关键词
TiNi合金薄膜
磁控溅射
组织形貌
马氏体相变
TiNi alloy thin film
magnetron sputtering
morphology
martensitic transformation
