摘要
研究直线时栅位移测量系统中的误差规律,对提高时栅测量系统的测量精度及进一步优化系统结构具有重要意义。在分析直线时栅测量系统误差来源的基础上,定量分析了时栅误差、导轨误差、滑台及连接臂变形误差,建立了时栅测量系统的全误差模型;研制一套激光干涉仪与时栅测量系统标定实验装置,实现了时栅测量系统误差的分离,并利用该模型对测量系统进行误差修正,显著提高时栅测量系统的测量精度,修正后的精度达±8 m/m,测量不确定度减小一半。
The error law in displacement measurement system of linear time grating was researched. It is important for improving the measurement accuracy and further optimizing the structure of the measurement system. On the basis of the analysis of error sources of the system, time grating errors, guideway errors, slide table errors and deformation errors of the linking ann were presented quantitatively, and the total error model of time grating was set up. An experimental device was developed to realize the error separation of the time grating measurement system by the comparison for the laser in- terferometer and time grating measurement system. The measurement accuracy of the time grating measurement system was improved significantly by correcting the system error using the error model. The precision reached to ±8μm/m after calibrating, and the measurement uncertainty was reduced by half.
出处
《电子测量与仪器学报》
CSCD
2013年第1期15-20,共6页
Journal of Electronic Measurement and Instrumentation
基金
国家自然科学基金(50975304)
国家自然科学基金(51005263)
重庆市教育委员会科学技术研究(KJ110808)资助项目
关键词
时栅测量系统
误差模型
误差修正
time grating measurement system
error model
error correction
