摘要
应用基于平均散射截面低能电子在多元介质中散射MonteCarlo方法 ,模拟E0 ≤ 5keV低能电子在多种多元介质中散射。计算了电子背散射系数 ,背散射电子能谱、角分布 ,入射电子、背散射电子在介质中的作用范围、沉积能分布 ,并与确定散射中心方法的结果比较。两种方法计算结果广泛一致 ,进一步证明基于平均散射截面方法的有效性和可靠性。入射电子能量较低 ,介质平均原子序数较大时 ,计算的背散射电子角分布不服从余弦分布律。
Using Monte Carlo method of low energy electron scattering in polybasic medium based on the mean cross section,the scattering process of the low energy electron in the range of E 0 ≤5 keV has been numerically simulated.A series of the results,such as the backscattering coefficients,the energy spectrum and angular distribution of backscattered electrons,the interaction range of both primary and backscattered electrons in medium,energy dissipation distribution,have been obtained and compared with those calculated by the method of determining scattering center.The calculated results by both methods are in excellent agreement widely,showing the effectiveness and reliability of the method based on mean cross section.Also,the calculated results on the angular distributions of backscattered electrons seem not to follow a cosine law for both the lower energies as well as the medium with larger mean atomic number. [
出处
《计算物理》
CSCD
北大核心
2000年第3期331-336,共6页
Chinese Journal of Computational Physics
基金
国家自然科学基金
山东省高校中青年学科带头人基金资助项目
关键词
低能电子散射
多元介质
散射
原子
蒙特卡罗法
low energy electron scattering
Monte Carlo method
polybasic medium
mean cross section.
