摘要
建立了平板型和球面型行星夹具膜厚均匀性的计算模型。利用根据这些模型编制的计算程序计算了基板表面膜层厚度分布与蒸发源位置、蒸发源发射特性、夹具高度、行星轨半径以及行星夹具的倾角之间的关系。
Calculating models for flat and spherical planetary fixture were developed. Based on these models, programs were developed to calculate and analyze the film thickness distribution on these type substrates as a function of evaporating source's location, emissive characteristic of the source, the vertical height of fixture and the radius of planetary orbit. Representative results were given here.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2000年第3期277-280,共4页
High Power Laser and Particle Beams
基金
国家 8 63激光技术领域资助课题
