摘要
PIN四象限探测器在应用过程中对其输出一致性的要求很高。文章讨论了影响PIN四象限探测器输出一致性的各种因素,并有针对性地提出了相应的改进措施。通过仿真分析,对PIN器件的各项参数进行了优化设计,并制作出了可工作在1 060nm波长、50V偏压下的PIN四象限探测器,其每个象限响应度达到0.3A/W,暗电流小于50nA,四个象限输出不一致性小于10%。然后通过对单个芯片的四个象限分别进行放大电路的安装调试,制作出了输出不一致性小于3%的四象限探测器器件。
Various factors which affect the consistency of the output characteristics of PIN four-quadrant detectors are discussed,and the corresponding methods are proposed.With simulation analysis,the design parameters are optimized,and the detectors working at 1 060 nm wavelength under 50 V bias are fabricated.The response of 0.3 A/W and dark current less than 50 nA are obtained for each quadrant of the PIN detectors.The output difference of the four quadrants is less than 10% for the detector chip.Then by making installation and debugging of the amplifying circuit for each quadrant,the four-quadrant detectors with the output difference less than 3% are fabricated.
出处
《半导体光电》
CAS
CSCD
北大核心
2012年第6期775-778,共4页
Semiconductor Optoelectronics
关键词
四象限探测器
输出特性
精确度
four quadrant detector
output characteristics
accuracy
