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共蒸发三步法制备CIGS薄膜的相变过程 被引量：5

Phase Transformation of CIGS Film Prepared by Co-evaporation "Three-stage Process"
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摘要 本文采用共蒸发三步法沉积Cu(In,Ga)Se2(CIGS)薄膜,其中关于Cu化合物的相转变过程是制约吸收层质量的关键。本文详细研究了三步法工艺中吸收层由贫Cu薄膜向富Cu薄膜转变的相变过程,通过X射线衍射仪(XRD)、X射线荧光光谱仪(XRF)及扫描电镜(SEM)结合的方法总结出三步法工艺的相变过程。 In this paper,Cu（In,Ga）Se2（CIGS） thin film via co-evaporation ＂three-stage process＂ has been investigated.The Cu-compound transformation process of ＂three-stage process＂ is the key problem for the high-quality absorb.The phase transformation from Cu-poor film to Cu-rich was concluded by XRD,XRF and SEM results.
作者 刘芳芳 张力 何青
机构地区 南开大学薄膜器件与技术研究所
出处 《人工晶体学报》 EI CAS CSCD 北大核心 2012年第6期1519-1523,共5页 Journal of Synthetic Crystals
基金 国家自然科学基金(61144002) 中央高校基本科研业务费专项资金(65010351)
关键词 CIGS薄膜 共蒸发三步法 相变过程 CIGS film co-evaporation ＂three-stage process＂ phase transformation
分类号 O484 [理学—固体物理]
  • 相关文献

参考文献10

  • 1Philip J, Dimitrios H, Erwin L, et al. New World Record Efficiency for Cu ( In, Ga) SO2 Thin-film Solar Ceils beyond 20% [ J ]. Progress in Photovoltaics : Research and Applications,2011,19(7) :894.
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同被引文献27

  • 1敖建平.CIGS薄膜太阳电池产业化的最新进展及发展趋势[J].人工晶体学报,2012,41(S1):189-195. 被引量：4
  • 2敖建平,孙云,王晓玲,李凤岩,何青,孙国忠,周志强,李长健.共蒸发三步法制备CIGS薄膜的性质[J].Journal of Semiconductors,2006,27(8):1406-1411. 被引量：12
  • 3杨邦朝 王文生.薄膜物理与技术[M].成都:电子科技大学出版社,1997..
  • 4李微,敖建平,何青,刘芳芳,李凤岩,李长健,孙云.衬底对Cu(In,Ga)Se_2薄膜织构的影响[J].物理学报,2007,56(8):5009-5012. 被引量：10
  • 5熊绍珍,朱美芳著.太阳能基础与应用[M].北京:科学出版社,2009:13-17.
  • 6Fraunhofer ISE. World Record: 41.1% Efficiency Reached for Multi-Junction Solar Cells at Fraunhofer ISE [ R ]. Press Release, 14-01-2009.
  • 7Bauknecht A, Siebentritt S, Gerhard A, et al. Defects in CuGaSe2 Thin Films Grown by MOCVD [ J ]. Thin Solid Films,2000,361-362:426- 431.
  • 8Saad M, Riazi H, Bucher E, et al. CuGaSe2 Solar Cells with 9.7% Power Conversion Efficiency [ J ]. Applied Physics A : Materials Science & Processing, 1996,62 ( 2 ) : 181-185.
  • 9Young D L, Keane J, Duda A, et al. Improved Performance in ZnO/CdS/CuGaSe2 Thin-Film Solar Cells [J]. Progress in Photovoltaics: Research and Applications, 2003,11 ( 8 ) : 535-541.
  • 10Nishiwaki S, Siebentritt S, Walk P, et al. A Stacked Chalcopyrite Thin-Film Tandem Solar Cell with 1.2 V Open-Circuit Voltage[J]. Progress in Photovoltaics : Research and Applications,2003,11 ( 4 ) : 243-248.

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人工晶体学报
2012年 第6期

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