摘要
研究了利用IBAD方法沉积类金刚石薄膜时,离子的辅助轰击能量对薄膜的微观结构、表面粗糙度、弹性、硬度以及摩擦系数的影响,获得了机械和摩擦性能优异的类金刚石薄膜。讨论了薄膜微观结构和性能之间的关系,分析了不同硬度测试方法的差异。
Effect of ion bombardment energy on microstructure, surface roughness, elasticity, hardness and friction coefficient of the diamond like carbon (DLC) films deposited by ion beam assisted deposition (IBAD) has been studied The DLC films with good mechanical and tribological properties have been obtained The relationship between microstructure and properties has also been discussed It has been found and analyzed that there is difference between the value of knoop microhardness and nanohardness of the same series of DLC films
出处
《材料工程》
EI
CAS
CSCD
北大核心
2000年第2期3-5,44,共4页
Journal of Materials Engineering
基金
国家自然科学基金!资助项目 (1 9672 0 34
597351 1 0 )
