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微细磨料水射流切割技术的研究进展 被引量:3

Research Progress of Micro Abrasive Water-jet Cutting Technology
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摘要 产品小型化和加工过程微型化是现代制造加工业的发展趋势,为适应微器件的精加工,在常规磨料水射流切割技术基础上,微细磨料水射流切割技术逐渐改进和发展起来了。微细磨料水射流直径在1~100μm之间,比常规磨料水射流直径(500~1200μm)小一个数量级,其割缝宽度、表面质量已达到激光切割的加工水平。微细磨料水射流特别适合对金属、陶瓷、半导体以及高分子聚合物等难加工的硬脆材料进行微细加工,是一种具有广阔应用前景的全新微型加工技术。为了解该项技术的最新发展情况,该文介绍了微细磨料水射流的特点、射流的生成方式及切割机理,以及影响切割性能的主要参数和部分工业应用实例,最后提出了微细磨料水射流切割技术有待深入研究的问题和今后的发展趋势。
出处 《液压与气动》 北大核心 2012年第12期134-138,共5页 Chinese Hydraulics & Pneumatics
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参考文献8

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共引文献35

同被引文献84

  • 1康仁科,马付建,董志刚,郭东明.难加工材料超声辅助切削加工技术[J].航空制造技术,2012,55(16):44-49. 被引量:49
  • 2孔德杰,张光先,乔立强,齐兆亮.数控等离子切割技术在我国的现状与发展[J].电焊机,2005,35(1):6-7. 被引量:24
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二级引证文献36

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