摘要
论述了 Ti N多弧离子镀涂层过渡层的组成及其形成机制和影响因素。实验结果及分析表明 ,Ti N涂层过渡层由混合层及扩散层组成 ,扩散层包括 Ti原子扩散层及 N原子扩散层 ;影响扩散层的主要因素是基体材料的成分和沉积温度 ;具有 N原子扩散层的过渡层将使涂层的结合力明显提高。
The formation theory and composition of TiN interlayer were studied. The results show that TiN interlayer is composed by mixed layer,Ti atom diffusion layer and N atom dispersion layer.It is the compostiton of bulk material and deposition temperature that mainly affects the diffusion layer. The interlayer containing N atom diffusion layer will improve TiN coating's adhesion obviously.
出处
《新技术新工艺》
北大核心
2000年第9期35-37,共3页
New Technology & New Process
