摘要
本文从理论上研究了离子初始速度对等离子体鞘层厚度的影响,建立了理论计算公式和数值模拟方法,考察了离子初始速度对鞘层厚度的影响因子。在离子初始能量为3.2eV情况下,用粒子模拟程序进行了数值模拟,模拟与理论计算得到的空间电场分布十分接近。
The effect of initial velocity of ion on plasma sheath thickness was investigated in theory.Based on theoretical formula and numerical simulation,dependence of plasma sheath thickness on initial velocity of ion was further evaluated.Particularly,under 3.2 eV initial energy of ion,the PIC simulation was applied to deal with space-charge-limited current density.It is found that the model results are in good agreement with those calculated by the PIC simulation.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
2012年第B09期501-504,共4页
Atomic Energy Science and Technology
关键词
离子初始速度
等离子体鞘层
粒子模拟
initial velocity of ion
plasma sheath
particle simulation
