摘要
在相移干涉中有时采用白光干涉来扩大深度测量范围 ,白光光源的使用 ,缩短了光束的相干长度 ,降低了测量精度。本文从干涉理论出发推导了白光相移干涉法测量三维表面形貌的计算公式 ,通过数值积分的方法分析了干涉光频谱对测量精度的影响。分析表明 ,在白光相移干涉测量中表面形貌的测量精度与中心波长和频谱宽度有关 ,白光频谱越宽 ,测量精度越低 ,中心波长越大 ,测量精度越高。
Sometimes white light interference is applied to enlargement of depth measuring range in phase shift interference.The usage of white light source shortens the coherence length of beam and reduces the measuring accuracy.Starting from the interference theory,the paper derives the formulae for calculating 3 D surface profile measured with white light phase shift interferometry.The influence of the interferenc light spectrum on measuring accuracy is analyzed through numerical integration.The analysis shows that in white light phase shift interferometry the measuring accuracy of the surface profile is concerned with central wavelength and spectral width.The wider the white light spectrum,the lower the measuring accuracy.the larger the central wavelength,the higher the measuring accuracy.
出处
《光电工程》
CAS
CSCD
2000年第3期4-7,共4页
Opto-Electronic Engineering
关键词
白光干涉术
频谱
测量精度
Phase shifting interferometry
White light interferometry
Frequency spectra
Surface shape measurement
Measuring accuracy
