摘要
Ar/N2/CH4 glow discharge at low-pressure are studied in a closed system. The plasma was produced in 79.6% N2-15.4% Ar- 5.0% CH4 ternary mixture at pressures between 0.5 and 10.0 Torr. The diagnostic has been made by optical emission spectroscopy （OES）. The principal species observed were： N2, N2＋, CH＋, CN, C2, C3, HI3, Ha, C＋ and At. It presents the behaviour of the bands and lines intensities as a function of the pressure. Also, it displays the ratios of intensities of N＋2 （391.44 nm）, CN （392.08 nm）, and H （486.13 nm） to that of the N2 （337.13 rim） as function of pressure. The ratios show a slow decreasing behavior as a function of the pressure. Being the CH/N2 ratio more highest and H/N2 ratio the lowest one. The variations of excited species at different pressures may change the subsequent chemical reactions in the gas phase significantly. The present results suggest that the ion-molecule and molecule-molecule reactions in the gas phase are likely to play a dominant role in the present pressures.
