摘要
介绍一种采用矩形双岛硅膜结构,量程为6kPa的扩散硅低压传感器。该传感器具有非线性内补偿和20倍量程以上的过压保护功能。着重介绍了该产品的设计、芯片制造与封装工艺、温度系数补偿办法和传感器技术性能的测试结果。
A 6kPa ranged diffused silicon low pressure transducer which uses the rectangular dual island silicon film construction is introduced. The transducer features internal non-linear compensation and 20 times overrange protection capability. The design, die fabrication and packing of the products are emphasized. The compensation method of the temperature coefficient and the testing result of the transducer’s technical features are also given.
出处
《自动化仪表》
CAS
北大核心
1992年第11期15-19,共5页
Process Automation Instrumentation
