摘要
在常压空气环境下,利用脉冲激光作用于硅基铝酸镧薄膜,实验发现激光器能量为20 mJ,脉冲频率3 Hz,薄膜损伤小且能获得较好品质的光谱;并依据两分析元素光谱强度比与原子数比之间成一定的线性关系,对分析线的选择进行了实验研究,发现线性拟合度不仅与分析线对的选择有关,而且与分析样品元素比率大小有关。测量结果表明,当分析线对为La II 394.91 nm/Al I 394.40 nm时,其测量相对误差为0.59%;分析线对为La II 394.91 nm/Al I 396.15 nm时,相对误差是8.32%。可见合理选择分析线对有利于提高薄膜组份比率检测精确度。
In this paper,we found better spectrum with smaller damage when the pulse laser action on LaAlO3 based on silicon at ordinary pressure was set 20 mJ and 3 Hz.According to the linear relation between the spectral intensity ratio and the atomicity ratio of two analytical chemical elements,we investigated on the analysis line pairs.It was found that the linear fitting degree have related with analysis line pairs and quantity of analytical elements ratio.The measurement results show that the analysis line pair was La II394.91 nm/ Al I394.40 nm,the measuring relative error is 0.59 %,If the analysis line pair was La II 394.91nm/Al I 396.15 nm,the measuring relative error is 8.32 %.This is helpful to improve the measuring accuracy of film component ratio.
出处
《应用激光》
CSCD
北大核心
2012年第5期420-423,共4页
Applied Laser
关键词
激光诱导击穿光谱
分析线对
铁电薄膜
组份比率
laser induced breakdown spectroscopy
analytical line pair
ferroelectric film
component ratio
