摘要
对微米级锆钛酸铅(PZT)粉体的无水乙醇溶液进行兆赫超声处理,制备PZT纳米颗粒,将试样滴于蒸金硅片上并进行烘干处理,采用压电力显微镜观测其尺寸、表面形貌及纵向压电系数。试验结果表明,试样中微米级PZT颗粒的纵向压电系数在20～40pm/V上下浮动,纳米级PZT颗粒纵向压电系数在2～10pm/V上下浮动,均具有压电性能。该方法为制备厚膜压电器件提供了一种可行的技术途径。
PZT nano-particles have been prepared by the megahertz ultrasound treatment on the micro PZT powders in anhydrous ethyl alcohol solution.The sample was dropped on the surface of silicon wafer being evaporated with gold and was dried,then the two-dimensional size,surface morphology and longitudinal piezoelectric coefficient were observed using PFM.It is demonstrated that the longitudinal piezoelectric coefficients of the micro and nano PZT powders fluctuated in the range of 20-40 pm/V,and 2-10 pm/V respectively,both of the samples had the piezoelectric properties.This method might provide a feasible technical approach for the preparation of piezoelectric thick film.
出处
《压电与声光》
CSCD
北大核心
2012年第5期772-775,共4页
Piezoelectrics & Acoustooptics
基金
国家留学回国人员科研启动基金资助项目(Hg98004)
