摘要
本文介绍了干式真空泵的抽气原理、定义和特点及其应用 ,最后简述了干式泵抽除颗粒物质的措施和方法。
In this paper, the pumping principle, definition,performance of dry vacuum pump and its applications are described . Then briefly introduce the method to pump the particulate material with dry pump.
出处
《真空》
CAS
北大核心
2000年第3期1-9,共9页
Vacuum
