摘要
针对部分天馈器件结构复杂和腔体尺寸太小无法进行传统镀覆防护的特点,提出了真空气相沉积派拉纶(Parylene)膜层防护处理方法。采用涂覆硅烷偶联剂、优化涂覆工艺过程解决了Parylene涂覆层与基体的结合力、Parylene膜层质量等关键技术,通过防护试验和电性能测试验证了防护方法的有效性和可行性。
Some antenna-feeder devices have too complicated structure or too tiny narrow path to be protected by tra- ditional plating process. According to above characters, vacuum vapor deposition process for Parylene method is pro- posed. Silane process is used to improve the adhesion between Parylene fill and the base. The deposition process is investigated to increase the fill quality. The processed chamber has passed the anti-corrosion and EM test.
出处
《电讯技术》
北大核心
2012年第6期1035-1037,共3页
Telecommunication Engineering
关键词
直升机载雷达
毫米波平板裂缝阵天线
天馈系统
涂覆技术
防护
派拉纶
真空气相沉积
helicopter - borne radar
MMW plate slotted - array antenna
anterma-feeder device
smear technolo- gy
protection
Parylene
vacuum vapor deposition
