摘要
SiCl4主要是作为改良西门子法生产多晶硅的副产物得到,SiF4主要是作为磷肥工业的副产物氟硅酸分解得到,但是二者纯度都不能满足生产多晶硅的要求,需进行分离纯化得到高纯物质。本文针对SiCl4和SiF4的物化性质、合成工艺、精制方法、应用前景等方面做了探讨和比较,指出SiF4比SiCl4更具应用前景。
Silicon tetrachloride is obtained from the byproduct of polysilicon production by improved Siemens method. Silicon tetrafluoride is mainly got from the decomposition of fluosilicic acid which is a byproduct of phosphate fertilizer industry. However, the purity of both silicon tetrachloride and silicon tetrafluoride cannot meet the requirements of polysilicon production. Therefore, the purification for obtaining high-purity substances is needed. In this paper, the physical and chemical properties, synthesis, purification methods and application prospects of＂ silicon tetrachloride and silicon tetrafluoride are discussed in detail. It points out that SiF4 has more application prospects than SiC14.
出处
《现代化工》
CAS
CSCD
北大核心
2012年第6期34-38,共5页
Modern Chemical Industry
关键词
四氯化硅
四氟化硅
物化性质
合成工艺
精制工艺
silicon tetrachloride
silicon tetrafluoride
physical and chemical properties
synthesis
purification methods
