摘要
介绍了工业变送器用 75系列扩散硅压力传感器。其整体结构为全固态结构 ;其硅膜片结构分别为C型、E型和EI型三种形式 ;测量范围为 0 6kPa～ 5 0MPa;使用温区为 - 3 0～ +80℃ ;全量程。
This paper introduces the series 75 diffused-silicon sensors applied in the industrial transmitter.Their structures are all-solid-state,and diaphragms are C-type、E-type and EI-type separately.The measuring range of the sensor is 0 6kPa～50MPa and temperature range is -30～+80℃.It meets the requirements for the industrial transmitter in full span and full series.
出处
《仪表技术与传感器》
CSCD
北大核心
2000年第2期4-6,9,共4页
Instrument Technique and Sensor
