摘要
用迈克尔逊显微干涉仪能实现光纤连接器端面的参数测量，给出光纤端面的二维截面图和三维形貌图。本文描述了它的测量原理、关键技术和测量精度。
A useful surface interferometer of fiber connectors,which can give not only 2 D profile and 3 D topography of testing surface,but also the evaluation parameters of surface roughness,based on Michelson interferometer,is presented.The principle of operation,key technique about system design and testing accuracy are described.
出处
《激光杂志》
CAS
CSCD
北大核心
2000年第1期33-34,共2页
Laser Journal
