摘要
多孔硅(Porous Silicon,PS)平面阴极的场发射电子能量高、发散角小、对真空度不敏感、响应快,尤其适合用作场发射显示的电子源,基于PS阴极的无放电气体激发发光也为新型环保的高效平面光源技术带来了希望。本文介绍了PS阴极的电子发射原理及其研究进展,展望了其在显示技术、无放电气体激发发光技术、金属线沉积、电子束刻蚀以及其他领域的应用前景。
Porous silicon（PS） cold cathode has several advantageous features,such as high energy electrons emission,narrow emission angle,insensitivity to vacuum pressure,and quick dynamic response.This type of cathode is a good choice for field emission display.Moreover,it brings the hope for the fabrication of mercury-free,efficient,and stable flat panel light sources based on discharge-free light emission.This paper introduces the structure and developments of PS cathode and its potential applications in display devices,gas excitation without discharge,thin metal film deposition,electron beam lithography and so on.
出处
《真空电子技术》
2012年第1期36-42,共7页
Vacuum Electronics
基金
中央高校基本科研业务费专项资金资助项目(No.2010-61)
关键词
多孔硅
冷阴极
表面电子发射
平板显示器件
Porous silicon
Cold cathode
Surface electron emitting
Flat panel display
