摘要
采用蒸发镀膜法制备了金属铝纳米膜,通过电子扫描显微镜(SEM)对纳米铝膜的表面形貌进行了观测,并采用标准四探针仪和半导体参数分析仪对薄膜的导电特性进行了分析。结果表明:在常温和毫安级电流下,纳米铝膜的电阻率呈非线性阶跃性变化,类似于在低温和纳安级电流下出现的库仑阻塞效应,这是由于膜厚度变小及膜表面的纳米结构所造成。
Aluminium nanofilms have been fabricated by evaporation coating technology. Their surface morphology and electrical conductivity were investigated using a scanning electron microscope （SEM） , four-point probe technology and a semiconductor parameter analyzer. It was found that the resistivity of the aluminium nanofilms was nonlinear at normal temperatures with currents of milliamperes, similar to the Coulomb blockade effect. This phenomenon of resistivity is caused by different thicknesses and nano-structured surfaces.
出处
《北京化工大学学报（自然科学版）》
CAS
CSCD
北大核心
2012年第2期33-36,共4页
Journal of Beijing University of Chemical Technology(Natural Science Edition)
关键词
纳米铝膜
蒸发镀膜
库仑阻塞效应
电阻率
aluminium nanofilm
evaporation coating
Coulomb blockade effect
resistivity
