摘要
本文介绍了制冷机低温泵的几种典型的再生方法 。
In this paper, the usual methodes to regenerate the refrigerator cooled cryopumps was introduced, and the way to judge the begining , the end of the regeneration process was discussed, also temperature measurement.
出处
《真空》
CAS
北大核心
2000年第1期29-31,共3页
Vacuum
