摘要
为了获得具有高质量光学表面的非球面碳化硅反射镜,需对碳化硅反射镜表面进行改性。介绍了离子束辅助沉积硅的碳化硅表面改性技术。对改性样片表面硅改性层的机械性能、光学加工性、表面粗糙度及反射率等特性进行研究。实验结果表明,碳化硅表面的硅改性层具有优良的机械性能和良好的光学加工性。光学抛光后,碳化硅表面硅改性层的表面粗糙度为0.85nm[均方根(RMS)值],在可见光波段反射率最高可达98.5%(镀银反射膜)。采用数控加工方法对口径为Ф600mm的表面改性离轴非球面碳化硅反射镜进行加工,最终反射镜面形精度的RMS值达到0.018λ(λ=0.6328μm),满足高精度空间非球面反射镜的技术指标要求。
In order to achieve high quality optical aspheric silicon carbide （SIC） mirror, the SiC surface must be modified primarily. Firstly, the modification technology of ion beam assisted deposition （IBAD） for depositing silicon （Si） on SiC mirror surface is introduced. Then, some characteristics, such as mechanical performance, optical fabrication capability, surface roughness and reflectivity, of Si modification layer on SiC surface are studied. The results of experiments show that the mechanical performance and the optical fabrication capability of Si modification layer on SiC surface are excellent. After polishing, the surface roughness and reflectivity of the Si modification layer on SiC are 0.85 nm [-root mean square （RMS）] and 98.5 %, respectively. Finally, an example of Si-modified SiC off- axis aspheric mirror （0600 mm） is polished by computer-controlled optical surfacing technology. The testing result indicates that the surface accuracy of the mirror is 0. 018,l （λ = 0. 6328 μm） RMS. It can meet the technical requirements of high quality space optical aspheric mirror.
出处
《激光与光电子学进展》
CSCD
北大核心
2012年第3期137-141,共5页
Laser & Optoelectronics Progress
基金
国家自然科学基金重点项目(61036015)资助课题
关键词
光学表面
碳化硅
表面改性
离子束辅助沉积
表面粗糙度
表面反射率
optical surface
silicon carbide
surface modification
ion beam assisted deposition
surface roughness
surface reflectivity
