摘要
为了获得高质量光学表面的非球面碳化硅(SiC)反射镜,对碳化硅反射镜表面改性技术以及离子束辅助沉积(IBAD)Si改性后的非球面碳化硅反射镜的加工技术进行了研究。介绍了碳化硅反射镜表面改性技术以及本文所采用的离子束辅助沉积(IBAD)Si的改性方法。然后,采用氧化铈(CeO2)、氧化铝(Al2O3)以及二氧化硅(SiO2)等各种抛光液对离子束辅助沉积(IBAD)Si的碳化硅样片进行抛光实验。最后,在上述实验的基础上,采用计算机控制光学表面成型(CCOS)技术对尺寸为650mm×200mm的表面改性离轴非球面碳化硅反射镜进行加工。实验结果表明:CeO2抛光液的抛光效率较高;使用SiO2抛光液抛光后的样片表面质量最好;表面改性离轴非球面碳化硅反射镜加工后的最终检测结果为:实际使用口径内的面形精度(RMS值)为0.016λ(λ=0.6328μm),表面粗糙度为0.85nm(Rq值)。反射镜的加工结果满足设计技术指标的要求。
In order to manufacture fine optical surface of aspheric silicon carbide（SiC） mirror, several surface modification technologies for SiC mirror are introduced, and the fabrication of surface modification aspheric SiC mirror is studied. The surface modification method on SiC mirrors by Ion Beam Assisted Deposition（IBAD）-Si is described especially. Then, several polishing agents, such as CeO2, Al2O3 and SiO2, are used in experiments for polishing SiC samples with surface modification. Finally, on the basis of experiments, a 650 mm× 200 mm off-axis aspheric SiC mirror with surface modification is manufactured by the technology of Computer-controlled Optical Surfacing（CCOS）. Experimental results indicate that a higher polishing efficiency is acquired with polishing agent of CeO2 and the best optical surface is fabricated with polishing agent of SiO2. The tested results indicate that surface accuracy of the aspheric SiC mirror with surface modification is 0. 016λ（RMS）（λ=0. 632 8 μm）and surface roughness of the mirror is 0.85 nm（RMS） ,which can satisfy the desired optical performance.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2008年第12期2479-2484,共6页
Optics and Precision Engineering
基金
国家自然科学基金资助项目(No.60108003)
