摘要
本文叙述直线型原子探针的设计和制造技术,其质量分辨本领M/△M≈300,探测效率约50%。文中还讨论了提高质量分辨本领的方法。
In this paper, the development of Linear-type Time-of-Flight Atom Probe has been described. The resolution M/△M is about 300, and the detect efficiency is about 50%. We also discuss how the mass resolution can be further improved.
出处
《质谱学报》
EI
CAS
CSCD
1990年第1期22-27,共6页
Journal of Chinese Mass Spectrometry Society
