摘要
空间激光通信常采用干涉截止滤光膜对不同波段的光谱进行分光。着重介绍了近红外三波段光学滤光片的研究与制备。根据膜系设计理论,分别选择TiO2和SiO2作为高、低折射率材料,借助膜系设计软件设计优化了合理的膜系,实现了770～860nm及1530～1575nm光谱范围双波段的高透过和1615～1700nm波段的高反射。采用电子枪离子辅助沉积系统进行制备。优化工艺参数,通过调整补偿挡板使膜厚均匀性控制在3%以内。虽然制备膜层较厚,但经检测其光学性能、机械性能及耐环境能力均满足使用要求。用轮廓仪检测所制备膜层的面形,其峰谷值变化达到预期要求。
Filter is often used to interfere the spectral spectrum into different bands in free space laser communication. This article mainly introduces the research and preparation of a three-band near infrared optical filter. According to the design theory, TiO2 is selected as the material of high refractive index and SiO2 as the low one to realize high transmittance in two bands of 770- 860 nm and 1530-1575 nm, and high reflection in the band of 1615--1700 nm. The film stack is designed by film design software, and electron gun and ion-assisted deposition system are used for film preparation. The process flow is optimized through the adjustment of process parameters to get a good thickness uniformity of less than 3 % by adjusting the compensation bezel. Although the film is thick, it meets the use requirement as shown by the tests of optical properties, mechanical properties and resistance to the environment. In addition, the quality of the coating surface successfully passes the test of the surface profile instrument, meanwhile, the variation of profile peak-toivalley （P-V） value can meet the design requirements.
出处
《激光与光电子学进展》
CSCD
北大核心
2012年第1期146-151,共6页
Laser & Optoelectronics Progress
基金
吉林省部产学研结合项目(2010A090200006)资助课题
关键词
薄膜
干涉滤光膜
离子辅助沉积
牢固度
峰谷值
thin films
interference filter
ion assisted deposition
durability
peak-to-valley value
