摘要
选取二氧化钛与二氧化硅作为薄膜材料,借助膜系设计软件优化设计膜系。采用离子源辅助沉积的真空镀膜方法,通过调整镀膜工艺参数,减少膜厚控制误差,在石英基底上成功镀制了符合使用要求的多波段滤光膜。所镀膜层在420～640 nm与近红外920～960 nm波段的平均透射比大于95%,680～880 nm和990～1100 nm波段的平均透射比小于3%,能够承受恶劣的环境测试,完全满足红外夜视摄像机的使用要求。
TiO_2 and SiO_2 are chosen as the film materials.A Macleod software is used to optimize the film systems. Vacuum depositing method with the aid of ion assistant deposition systems is adopted,through optimizing technical parameters,reducing thickness error,multi-band filter film is successfully deposited on the substrate of quartz crystal.In the condition of vertical incidence,the average transmittance exceeds 95%in 420～640 nm and 920～960 nm,below 3%in 680～880 nm and 990～1100 nm.It conforms to the environmental stability standards,completely meets the demands of infrared night-vision camera.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2010年第3期903-906,共4页
Acta Optica Sinica
基金
省部产学研合作专项资金项目(2007A090302007)资助课题
关键词
薄膜光学
干涉滤光膜
光学低通滤波器
离子辅助沉积
thin film optics
interference filter film
optical low-pass filter
ion assistant deposition
