摘要
研制了一套过滤式阴极电弧沉积设备 ,并利用该设备成功地获得了类金刚石薄膜。扫描电镜分析表明 :获得的薄膜在硅基片上是光滑和致密的。喇曼光谱研究表明 ,这种薄膜是典型的无氢类金刚石薄膜。膜层的摩擦试验表明 :无氢类金刚石薄膜的摩擦系数较低 。
The instrument of filtered cathode arc deposition is successfully built in our laboratory. Diamond like carbon film is maded. SEM studies show that on the wafer substrate, the film is smooth and dense. Raman spectrum study shows that the film has typical pikes of hydrogen free diamond like carbon film. Tribological test shows the coefficient is very low and is an ideal wearable material.
出处
《机械科学与技术》
CSCD
北大核心
2000年第1期125-126,共2页
Mechanical Science and Technology for Aerospace Engineering
关键词
无氢
类金刚石薄膜
过滤式
阴极电弧沉积
Hydrogen free diamond-like carbon film
Filtered cathode arc deposition
Raman spectrum
