摘要
提出一种通过对远场散射光分布的统计分析来测量中等以上精度表面粗糙度的新方法。采用半导体激光器作为光源,并使用一维 CCD 器件来探测散射光分布。实验结果表明,在 R_a≤2.2μm 的范围内,远场归一化散射光分布的标准偏差(σ)与标准粗糙度参数 R_a 之间有很好的相关关系。
A new method for measuring roughness of medium or high preci- sion surfaces is introduced.The method is based on the statistical analysis of the scattered light distribution on far-field.A laser-diode is used as the sour- ce and a linear CCD is employed in detecting the scattered light distribu- tion.Experimental results show that within the range of R_a 2.2μm,there is a good correlation between the variance (σ) of scattered light distribution and the standardized roughness parameter R_a.
出处
《宇航计测技术》
CSCD
北大核心
1990年第6期5-9,共5页
Journal of Astronautic Metrology and Measurement
关键词
表面粗糙度
光散射
测量
激光器
Light scattering
Laser-diode
Surface roughness
Chargecoupled device
Contactless measurement
