摘要
介绍一种高分辨力、无接触式测量超光滑表面粗糙度参数的反散射计算测量技术。实现该技术的测量装置的角分辨力为0.1°。它可以测量导体或非导体表面纳米级精确度的粗糙度。
In this paper an inverse scattering calculation measurement technique for measuring roughness parameters of super-smooth surface with high-resolution and contactless type was described. The angular resolution of measuring equipment for realizing this technique is less than 0.1°. The equipment may measure conducting or nonconducting surface roughness of a body with accuracy of nanometer level.
出处
《宇航计测技术》
CSCD
北大核心
1993年第2期1-3,57,共4页
Journal of Astronautic Metrology and Measurement
基金
国家自然科学基金(高技术)资助项目
关键词
非接触测量
表面粗糙率
光散射
Contactless measurement,Surface roughness, Light scattering, Calculation method
