摘要
本文介绍了微位移动态测量干涉仪的计算机数据采集、处理系统以及4(1/2)位表头的改进和独特的输入接口。由于采用了先进的计算机技术,提高了干涉仪的精度,使其测量重复性3σ<0.002μm,并可根据用户需要,选用不同的采样间隔和测量范围,最后自动打印出被测试的电感式、电容式测微仪的非线性。
In this paper,a computer system is introduced,This system in the dynamic micro-displacement interferometer to collect and calculat works the datum.Due to the use of computer technology,the accuracy of the interferometer is improved.The repeatability is 3σ<0.002μm.And if it is necessary,the interval of the sample collected and the range of the measu- rement can be changed.When the measurement is finished,it will print the linearity of the tested capacitive or inductive micro-displacement measure- ment instrument automatically.A method to improve the 41/2 digital meter and a spacial I/O interface arc also introduced.
出处
《宇航计测技术》
CSCD
北大核心
1990年第4期4-9,共6页
Journal of Astronautic Metrology and Measurement
关键词
位移测量
动态测量
激光干涉仪
Displacement measurement
Dynamic measurement
Laser interferometer
Computer application
Data proccssing
