摘要
介绍了光谱共焦位移传感器的结构与原理,及其在测量厚度方面的应用,重点讨论了光谱共焦位移传感器用于测量透明材料平行平板厚度的可行性,对其产生的误差进行了详细的分析,并给出了相应的补偿方法。
The structure and principle of the spectral confocal displacement sensor were described in this paper,and the application to measuring the thickness was analyzed.The paper focused on the feasibility of measuring the parallel plates made of transparent materials.The measurement errors were also analyzed,and the corresponding compensation ways were given.
出处
《光机电信息》
2011年第9期50-53,共4页
OME Information
关键词
光谱共焦
位移传感器
色散系数
confocal chromatic
displacement sensors
dispersion coefficient
